MEMS Etching Tools - Importance To The Industry, Market Opportunities

By Roy van Rivero


If you are into semiconductor (or have been working in a semiconductor industry) you are probably aware of what MEMS is all about. In simpler terms, it pertains to miniaturized mechanical and electro-mechanical elements made using the microfabrication technology. MEMS is becoming more and more popular today and its growth is expected to continue in the coming years, fueled by the increasing demand of electronic products such as cellphone and other mobile devices.

The rapid increase of the number of people who are using mobile electronic devices (e.g. phone, tablet, laptop computer) is considered one of the major factors of the continued rise of the demand for MEMS products. Indeed, MEMS plays an important role in today's many industries.

MEMS etching tools - vital to MEMS systems/production

Etching is an industry process that helps manufacture MEMS / micro-electronic components. This process is done through the use of MEMS etching tools and here are some of them:

Wet bench - available both in manual as well as in fully-automated system; this is used for wet cleaning and etching process. This equipment comes with a number of modules (aka baths) that contain either cleaning or etching solutions. Semiconductor and other high tech components etching is done with the help of this equipment.

Intelligent process station - a technology that provides process control monitoring of wet chemistries used in the wet process. Capabilities of this equipment include concentration monitoring, turbidity control (which identifies the formation of undesirable materials in the liquid tanks), and film thickness monitoring.

Chemical distribution system - designed for the systematic management of chemicals used in the wet etching process. Some of the works it handles include chemical distribution, chemical waste collections, chemical dispense - among other procedures.

Market opportunities of MEMS etching tools

As I have said, the continued expansion of the electronic industry fueled by the rapid growth of demand of mobile devices also means growth for the MEMS industry. The MEMS sector is forecast to continue to grow; in fact, in 2012, the industry's estimated market growth (MEMS equipment market) was at USD 500 million - a big jump from USD 100 million in 2008. Needless to say, bright future is waiting for those who are looking for good opportunities in this industry, should the growth trend continue.




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