In semiconductor wet etching process, experts suggest that you choose an etching system that uses quartz tank (or is made from quartz materials). And there are compelling reasons why this is so. Well, aside from it is made from the second most abundant mineral that can be found in the Earth's continental crust, some practical reasons why it is recommended (and why you should use quartz tank) are the following:
Durability -- harder than granite and other well-known metals, quartz ranks 7th on the Mohs scale of mineral hardness. So, equipment that is made from quartz are durable as well; this is true when we talk of quartz tanks. Its durability is one that has made it popular in the industry.
Non-reactivity to a variety of chemistries -- quartz is also one of the materials that do not react to chemistries (e.g. it does not react with acid) and thus, the substrate that is processed inside it safe from contamination.
High purity - quartz provides high purity standard so there is nothing to worry about this problem. This is very important most especially when processing semiconductors wherein high purity is absolutely necessary.
Apart from quartz tanks, there are other products that can be used in wet etching process as well. Some of these products are the following:
Quartz boats - other term for this is 'substrate carriers'; they are designed to handle wafers measuring 4", 6", 8", and 12" in diameter. They can be in various designs and sizes. Manufacturers can also design quartz boats based on your specifications.
Quartz chambers -- designed to accommodate plasmas that can reach extremely high temperatures but need high purity and visual verification; they are ideal because they are high resistant to heat.
Quartz drains -- in general, these components are put on either the side or below the quartz tanks; these are utilized to recirculate chemistries or for chemical disposals.
Quartz aspirators -- these are also known as filter pumps; the tool is used to produce a vacuum by means of the Venturi effect; this is used in high temperature applications.
Quartz boat adapters - can reduce cost in wafer processing; can also help for increased production throughput.
Durability -- harder than granite and other well-known metals, quartz ranks 7th on the Mohs scale of mineral hardness. So, equipment that is made from quartz are durable as well; this is true when we talk of quartz tanks. Its durability is one that has made it popular in the industry.
Non-reactivity to a variety of chemistries -- quartz is also one of the materials that do not react to chemistries (e.g. it does not react with acid) and thus, the substrate that is processed inside it safe from contamination.
High purity - quartz provides high purity standard so there is nothing to worry about this problem. This is very important most especially when processing semiconductors wherein high purity is absolutely necessary.
Apart from quartz tanks, there are other products that can be used in wet etching process as well. Some of these products are the following:
Quartz boats - other term for this is 'substrate carriers'; they are designed to handle wafers measuring 4", 6", 8", and 12" in diameter. They can be in various designs and sizes. Manufacturers can also design quartz boats based on your specifications.
Quartz chambers -- designed to accommodate plasmas that can reach extremely high temperatures but need high purity and visual verification; they are ideal because they are high resistant to heat.
Quartz drains -- in general, these components are put on either the side or below the quartz tanks; these are utilized to recirculate chemistries or for chemical disposals.
Quartz aspirators -- these are also known as filter pumps; the tool is used to produce a vacuum by means of the Venturi effect; this is used in high temperature applications.
Quartz boat adapters - can reduce cost in wafer processing; can also help for increased production throughput.
About the Author:
Roy Van Rivero writes an array of technology-related subjects. He utilizes his years of work experience in the industry in writing these topics, including quartz tanks and inline heater for semiconductor. To learn more, visit Imtec Acculine, manufacturer of wet process module and system.
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